MSC2.5PN7.5
- Specifically Designed for E-Chuck Applications
- Two Reversible Outputs of Opposite Polarity
- Rated 2.5kV 3mA. Amplitudes are Set Independently
- Automatic User Configurable De-chucking Function
- 300mS Slew Time Driving 20nF of Load Capacitance
- Front Panel Control via Buttons and LCD Display
- RS-232, RS-485 and Ethernet Interface
- Free GUI for Testing and Development Work
Certifications & Compliance
The MSC2.5PN7.5 is a bipolar reversible power supply specifically designed for electrostatic chuck clamping applications. Two 0 to 2500 volt @ 7.5 watt reversible outputs that are of opposite polarity are provided on the two high voltage output connectors. Front panel controls via programming buttons and an OLED display allow local operation and control of the unit. The RS-232/RS-485/Ethernet digital interface allows for simple OEM integration into complex system designs.
- Specifications
- How to Order
Specifications
- Input:
+24Vdc ±5% @ <2 amps. Switch controlled on front panel and fuse protected. - High Voltage Output 1 and Output 2 Voltage:
0 to ±2500 volts. Output 1 and 2 amplitudes are independently programmable - Current:
0 to 3mA - Polarity:
Bipolar, High Voltage Output 1 polarity always opposite of High Voltage Output 2 - Dimensions:
12.45˝ L x 8.03˝ W x 3.46˝ D (316mm x 204mm x 88mm) - Weight:
3.09lbs. (1.4kg) - Protection:
Arc and short circuit protected. Equipped with input and output current limits. Output current limit settable from 0.1mA to 3mA.
Not designed to withstand continuous arcing. - Auto-Toggle/De-Chucking Function:
This unit has both a manual and a customer configurable automatic toggle function (degauss/de-chuck). - Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.
How to Order
| How to Order: | ||
|---|---|---|
| MSC Power Supply: PART NO.: MSC2.5PN7.5 |
||
| Power input cable, 3m: PART NO.: HVC05/2NSO/1229 |
||
| HV Output cable, 3m: PART NO.: HVC5/1ISO/1228 |
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| Set of brackets for rack mount: PART NO.: MSCK100 |
Typical Applications:
- E-chucks
- Electrostatics
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