FIB Series
- Integrated Accelerator and Ion Source Chassis
- High Performance Ground Reference Lens Chassis
- Very Low Ripple and Ultra Stable Outputs
- Robust Arc and Short Circuit Protection
- Design to Minimize Micro-discharge Events
- Optically Isolated Digital Interface
- CE Marked & Designed to Meet SEMI S2
Certifications & Compliance
Spellman’s FIB Series is an integrated multiple output high voltage power supply specifically designed for focused ion beam applications. It incorporates a high stability accelerator voltage with the floating outputs to drive traditional Ga Ion and Plasma Sources.
An additional Lens Chassis is available, providing the high performance fixed or reversible polarity high voltage lenses required to focus the Ion Beam. Both the Main Chassis and Lens Chassis are 19” rack mountable. Focused Ion Beam is typically used in the semiconductor industry, materials science and increasingly in the biological field for imaging, etching and deposition of materials.
The Main Chassis provides an Acceleration voltage up to 35kV, with floating Filament, Extractor and Suppressor outputs, all designed to the exacting performance requirements for FIB applications. The Lens Chassis offers Lens voltages up to 30kV, with fixed or Reversible polarity.
All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications.
Customer control of this integrated FIB power supply system is accomplished via a fiber optic interface or Ethernet interface. All high voltage safety interlocks are of a failsafe hardware based design.
- Specifications
- Models
- How to Order
Specifications
- Input Voltage:
+24Vdc, ±5% @ 5.5 amps maximum. Inrush is <6 amps for 1 second. - Weight:
Main chassis:
67.46 lbs. (30.6 kg)
Lens chassis:
27.56 lbs. (12.5 kg) - Main chassis: 6.97” H x 19.02” W x 17.94”D (177mm x 483mm x 456mm)
- Lens chassis: 1.75” H x 19.02” W x 15.95”D (45mm x 483mm x 406mm)
- Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.
OUTPUT SPECIFICATIONS
| MODULE | FIBC35 | LGM | |||
|---|---|---|---|---|---|
| OUTPUT | Accelerator | Filament | Suppressor | Extractor | Lens |
| Output Voltage | 0 to 35kV, referenced to ground | 0 to 5V referenced to Accelerator, current controlled | -2kV to +2kV referenced to Accelerator | 0 to -15kV referenced to Accelerator | 30kV max, referenced to ground, positive, negative or bipolar. (see Lens Module options table) |
| Output current max | 30μA | 5A | 30μA | 400μA | 30μA or 50μA (see config. table) |
| Output current limit | 30μA | current controlled | 30μA | programmable 8 bit, 0 to 400μA | 30μA or 50μA ( see config. table) |
| Output Absolute Accuracy | 100V | 5mA | 20V | 100V | 100V |
| Load Regulation | ±0.01% of max for 0 to 30μA change | ±0.1% of max for 0 to 5V change | ±0.01% of max for 0 to 30μA change | ±0.01% of max for 0 to 400μA change | ±0.005% of max for 0 to max rated current change |
| Line Regulation | 100mV for a 5% line change | 5mA for a 5% line change | 100mV for a 5% line change | 100mV for a 5% line change | 100mV for a 5% line change |
| Ripple p-p from 0.1Hz to 1MHz | 200mV at max output | 10mA | 150mV | 100mV at 30μA and below | 200mV for 30kV bipolar outputs.150mV for all other output ratings |
| Temperature Coefficient | 25 ppm/°C | 200 ppm/°C | 25 ppm/°C | 25 ppm/°C | 25 ppm/°C |
| Stability (after 2h warm up) | 1.5V / 10h | 5mA/10min | 0.5V / 10h | 0.5V / 10h | 1V / 10h |
Models
LENS MODULES
| Available as Standard | Lens 1 Output | Lens 2 Output | ||
|---|---|---|---|---|
| Part number | Voltage | Current | Voltage | Current |
| LGM30P/25PN | 0V to +30kV | 30uA | -25kV to +25kV | 30uA |
| LGM30P/30P | 0V to +30kV | 30uA | 0V to +30kV | 30uA |
| LGM30P/25N | 0V to +30kV | 30uA | 0V to -25kV | 30uA |
| Available on Request | Lens 1 Output | Lens 2 Output | ||
| LGM20PN/30PN | -20kV to 20kV | 30uA | -30kV to +30kV | 30uA |
| LGM30N/25PN | 0V to -30kV | 30uA | -25kV to +25kV | 30uA |
| LGM20N/10N | 0V to -20kV | 50uA | 0 to -10kV | 50uA |
Please consult with factory for availability and custom configuration requests.
How to Order
HOW TO ORDER
| Description | Part number |
|---|---|
| FIB - Main Chassis | FIBC35 |
| LGM - Lens Chassis | See part number in Models tab |
| FIBC to Lens Modules Interconnection kit | FIBK826 |
| FIBC HV Output cable | 2.8 meters: HVC30/4ISO/1209 5 meters: HVC30/4ISO/1297 |
| Lens HV Output cable | 5 meters: HVC30/1S/1253 |
| FIB communication kit | FIBK100 |
| Optical to RS-232 converter | 21777 |
Typical Applications:
- Focused Ion Beam (FIB)
- Ion Gun Controller
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