EBM60-FEG
- Integrated Tetrode Supply for Field Emission SEM
- Very Low Ripple and Ultra Stable Outputs
- Robust Arc and Short Circuit Protection
- Designed to Minimize Micro-discharge Events
- RS-232 Digital Interface
- Free GUI for Testing and Development Work
- CE, UKCA and RoHS Marked
Certifications & Compliance
Integrated Tetrode Supply for Field Emission SEM
Spellman’s EBM60-FEG Series is an integrated, multiple high voltage power supply specifically designed to drive Field Emission Scanning Electron Microscope (SEM) columns. Spellman’s extensive applications knowledge has enabled us to develop a range of technology platforms that can be customized to meet the demanding requirements of SEM.
The main Acceleration Voltage is a high stability 60kV supply, with integrated floating Filament, Extractor and Suppressor outputs required to drive Field Emission, Cold Cathode and Schottky Electron Sources. All outputs are offered with ultra-low output ripple, minimal micro-discharge, excellent regulation, stability, temperature coefficient and accuracy specifications for unprecedented image quality and resolution. Isolation and control of the respective floating sources is provided via Spellman’s proprietary high voltage isolation techniques.
Customer control of this integrated EBM60-FEG power supply system is accomplished via an RS-232 interface. The unit is CE and UKCA marked.
- Specifications
- How to Order
- Downloads
Specifications
- Input Voltage:
100 to 240 Vac ±10% @1A max. 50 to 60 Hz ±5% - Weight:
86 lbs. (39kg) - Dimensions:
8.66” H x 16.86” W x 19.70”D (220mm x 428mm x 500mm) including handles - Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant. - Interlocks:
Two separate interlocks are provided:
Gun interlock: 24V output provided for an external volt free interlock
HV cable interlock: interlock plate mounted over the HV connec
OUTPUT SPECIFICATIONS
| Output | Accelerator | Filament | Supressor | Extractor |
|---|---|---|---|---|
| Output Voltage | -200V to -60kV referenced to ground | nominal 1V max 1.5V referenced to Accelerator | -10V to -1kV referenced to Beam Energy | 200V to 5kV referenced to Beam Energy |
| Output current - max | 300μA | 3A | 100μA | 500μA |
| Accuracy | ±5V | ±5mA (between 2A to 3A) | ±14V | ±2% |
| Linearity | < ± 5V between 500V and 60kV | ±10mA | ±14V | ±2V |
| Load Regulation | <±10ppm for 30μA to 400μA | <5mA for 10% in load resistance | <± 100ppm for 10μA to 90μA | <± 100ppm for 10μA to 500μA |
| Line Regulation or a ± 10% line change | <±10ppm | <1mA | <±10ppm | <±10ppm |
| Ripple p-p at max. output | <120mVp-p at 1Hz to 1MHz | <40mAp-p 20Hz to 10kHz across 0.5Ω @ 2.5A | <10mVp-p at 1Hz to 1MHz | <50mV p-p at 1Hz to 1MHz |
| Temperature Coefficient | <20 ppm/°C at 60kV after 1h warm up | <20 ppm/°C | <50 ppm/°C | <25 ppm/°C |
| Stability (1h warm up) | <15ppm or 40mV (whichever is greater) /10min | <30ppm/10min and 5mA/3 months @ 2.5A | <100ppm/10min | <20ppm/10min |
How to Order
HOW TO ORDER
| Description | Part Number |
|---|---|
| EBM60-FEG | EBM60N18/FEG |
| HV Output Cable - 3 meters | HVC75/4SO/1365 |
| HV Output Cable - 4 meters | HVC75/4SO/1366 |
Downloads
Typical Applications:
- Scanning Electron Microscopes (SEM)
- Electron Beam Controller
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