EBM-TEGR
- Triode Supply for Thermionic Emission SEM
- High Precision, Low Noise, Ultra Stable
- Over Current/Voltage, Arc and Short Circuit Protection
- RS-232 or RS-485 Digital Interface
- Free GUI for Testing and Development Work
- OEM Customization Available
- CE, UKCA and RoHS Compliant
Certifications & Compliance
Integrated Triode Supply for Thermionic Emission SEM
The EBM-TEGR is an integral solution that provides the high voltage required by Thermionic Emission Scanning Electron Microscope (SEM) in a 19'' rack mountable chassis.
Spellman’s proprietary packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings.
This unit provides a highly regulated, low noise, ultra stable Accelerator supply programmable up to -30kV at 400uA. This, together with Floating Filament and Grid supplies referenced to the Accelerator control the beam. The unit also includes high voltage outputs to drive the Detector, comprising PMT, Scintillator and Collector grounded outputs.
Customer control of this integrated EBM-TEGR power supply system is accomplished via RS-232 or the optional RS-485 interface. Five interlocks are provided. The unit is CE and UKCA marked.
- Specifications
- Models
- How to Order
- Downloads
Specifications
- Input Voltage:
100 to 264 Vac @2A max. 47 to 63Hz - Output Voltage
Accelerator (EHT): -100V to -30kV, referenced to ground
Filament : 5V max, 15W max center tapped to the Accelerator
Grid: -35V to -1650V referenced to Accelerator
PMT: 0V to -1300V referenced to ground
Scintillator: +50V to +11kV referenced to ground
Collector: -400V to +400V referenced to Accelerator - Output current - max
Accelerator (EHT): 400μA
Filament: 5A
Grid: 400μA
PMT: 1mA (current trip level:1.2mA)
Scintillator: 200μA
Collector: 4μA - Dimensions: 4.53” H x 17.33” W x 12.01”D (115mm x 440mm x 305mm)
- Weight:
39.7 lbs. (18kg) - Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.
Models
OUTPUT SPECIFICATIONS
| OUTPUT | Accelerator (EHT) | Filament | Grid | PMT | Scintillator | Collector |
|---|---|---|---|---|---|---|
| Output Voltage | -100V to -30kV, referenced ground | 5V max, 15W max center tapped to the Accelerator | -35V to -1650V referenced to Accelerator | 0V to -1300V referenced to ground | +50V to +11kV referenced to ground | -400V to +400V referenced to ground |
| Output current - max | 400μA | 5A | 400μA | 1mA (current trip level: 1.2mA) | 200μA | 4μA |
| Accuracy | ±2% or ±30V (whichever is greater) | ±5% or ±100mA (whichever is greater) | N/A | ±2% or ±1V (whichever is greater) | <1% or ±10V (whichever is greater) | ±2% or ±2V (whichever is greater) |
| Load Regulation | <10ppm for 30μA to 400μA | <5mA for a 0.4Ω to 1Ω change at 3A | N/A | <±100ppm for 0 to 1mA | <100ppm for 10μA to 200μA | <5% for 0 to 5 mA |
| Line Regulation at full load ± 10% line change | <10ppm | <5mA | N/A | <100ppm | <100ppm | <10mV |
| Ripple p-p at max. output | <100mV | 1mA at 50Hz 30mV at 100kHz at 3A,1Ω | N/A | <200mV | <100mV | <25mV |
| Temperature Coefficient | <50 ppm/°C | <300 ppm/°C | N/A | <100 ppm/°C | <250 ppm/°C | <50 ppm/°C |
| Stability (1h warm up) | <10 ppm/15min <25 ppm/1h |
<2mA/1h | <0.4μA/15min | 200 ppm/1h | <1%/1h | <50mV/15min |
How to Order
HOW TO ORDER
| Description | Part Number |
|---|---|
| EBM-TEGR | EBM30N12/TEGR |
| EBM-TEGR with RS-485 option | EBM30N12/TEGR/DCC4 |
| HV Output cable - 4 meters | HVC75/3SO/1382 |
Downloads
Typical Applications：
- Scanning Electron Microscopes (SEM)
- Electron Beam Controller
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