Physical Vapor Deposition
Physical Vapor Deposition is a term that covers a variety of thin film deposition techniques, many of which require high voltage DC power. Two very common PVD processes are sputtering and electron beam evaporation (e-beam evaporation). Spellman offers both general purpose and application specific power supplies for both techniques.
Spellman’s EVA Series is an ideal choice for e-beam evaporation systems. Designed using efficient and robust solid state circuit topologies, these supplies are highly tolerant of arcing and offer user configurable arc management settings that can be optimized for different processes and deposition conditions, to help maintain consistent and defect free coatings. The EVA Series power supplies are available in different configurations, including integrated filament supplies and multiple outputs, providing unmatched economy and flexibility.
As with e-beam evaporation power supplies, response to arcing is important for stable and consistent plasma sputtering processes. Many of our standard rack mount and modular supplies can be optimized for use in sputtering, for instance by limiting stored energy and tailoring arc recovery times. Due to the wide range of requirements for plasma sputtering power supplies, we encourage you to contact our applications experts to discuss your unique specifications.
- Output Voltages from 5kV to 10kV
- Output Power 3kW, 6kW and 12kW
- Designed for E Beam Coating Applications
- Fast, User Configurable Dynamic Arc Intervention
- Optional Filament Gun Supply (up to 3 channels)
- Models from 1kV to 225kV
- 12kW in Single 6U (10.5”) Chassis
- Parallel Units for >100kWChassis
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 70kV
- Output Power 4 kW
- Single 3U (5.25”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 150kV
- Output Power 6kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- Arc and Short Circuit Protected
- User Configurable Settings Via Ethernet Interface
