MSC2.5PN7.5 Electrostatic Chuck Power Supply

The MSC2.5PN7.5 is a bipolar reversible power supply specifically designed for electrostatic chuck clamping applications. Two 0 to 2500 volt @ 7.5 watt reversible outputs that are of opposite polarity are provided on the two high voltage output connectors. Front panel controls via programming buttons and an OLED display allow local operation and control of the unit. The RS-232/RS-485/Ethernet digital interface allows for simple OEM integration into complex system designs.

Specifications

^{(Ref. 128027-001 REV. C)}

Input:

+24Vdc ±5% @ <2 amps. Switch controlled on front panel and fuse protected.

High Voltage Output 1 and Output 2 Voltage:

0 to ±2500 volts. Output 1 and 2 amplitudes are independently programmable

Current:

0 to 3mA

Current Limit:

Output current limits can be independently set in the range of 0.1mA to 3.0mA in 0.1mA steps.

Power:

7.5 watts, maximum

Polarity:

Bipolar, High Voltage Output 1 polarity always opposite of High Voltage Output 2

Voltage Control:

Resolution = 1V
Accuracy = ±1% of programmed value

Regulation:

Line: <0.1% for 10% input voltage change under any load conditions

Load: <1.3% for zero to full load

Stability:

<0.1%/hour, <0.2%/8 hours at constant operating conditions after 1 hour warm up

Temperature Coefficient:

<50ppm per degree C

Ripple:

<0.1% p-p at full load, maximum output

Rise and Fall Times:

Rise time (0V to ±2500 V) and fall time (±2500V to 0V) are separately programmable in the range of 300ms to 9.9s (to within 1% of final voltage value)

Voltage Monitor:

Resolution = 1V
Accuracy = ±1% of actual output (±8 volt offset) 

Current Monitor:

Resolution = 1.25 μA
Accuracy = ±2% of actual output ±100μA offset

Typical Load Capacitance:

<20nF (for other load capacitance, contact Spellman)

Protection:

Arc and short circuit protected. Equipped with input and output current limits. Output current limit settable from 0.1mA to 3mA.

Not designed to withstand continuous arcing.

Auto-Toggle/De-Chucking Function:

This unit has both a manual and a customer configurable automatic toggle function (degauss/de-chuck)

Communication:

The unit can be operated locally from the front panel. It can also be controlled through the RS-232/RS-485 serial interface, or Ethernet. The serial interface can be configured via the front panel to either RS-232 or RS-485. The unit is shipped from the factory set to RS-232. 9600 baud, no parity, no handshake or flow control. Note: When Ethernet is connected to the LAN port, Serial comms is disabled.

Front Panel Indicators:

The unit has a 20 character by 2 line back lit OLED display and a high voltage status LED. Configuration and setting of various parameters can be accomplished via push button switches. The OLED will power down after five minutes and is reactivated by pressing any button. The red LED indicator illuminates when high voltage is being produced. When the unit is shutdown due to a fault the LED will flash at a 1 Hertz rate until the fault is cleared.

Front Panel Controls:

The unit has front panel buttons for local control.

Local

The unit has front panel buttons for local control.

Toggle

Manual change of output polarity

Output On/Off

Soft turns the high voltage output on and off

Mode

Changes the mode of operation and navigation menu

Rotary Control/Enter

For navigating and entering value changes

Environmental:

Temperature Range:

Operating: 0˚C to 45˚C

Storage: -35˚C to 85˚C

Humidity:

0 to 85% RH, non-condensing

Cooling:

Convection cooled

Input Power Connector:

2 pin Molex VersaBlade connector. A mating input cable is available (see How To Order table)

Serial Communications Connector:

9 pin female D connector 

High Voltage Output Connectors:

Radiall BNC-HT/MHV connector. Mating HV output cables are available (see How To Order table)

Installation Brackets:

A kit including 2 brackets and installation screws (M4x10) allows the unit to be mounted on a half width rack (see How To Order table)

Dimensions:

12.45˝ L x 8.03˝ W x 3.46˝ D (316mm x 204mm x 88mm)

Weight:

3.09lbs. (1.4kg)

Regulatory Approvals:

Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.

INPUT POWER — MOLEX VERSABLADE 2 PIN CONNECTOR

SERIAL COMMUNICATIONS — 9 PIN FEMALE D CONNECTOR

HOW TO ORDER

Tables & Diagrams

DIMENSIONS: in.[mm]

REAR VIEW

TOP VIEW

FRONT VIEW