Ion Implantation
Spellman High Voltage has been the preferred provider of high voltage power supplies for ion beam implantation for over three decades. Spellman’s SL Series from 1kV-360kV @ 10 watts to 2000 watts have outfitted implanters around the world. Special customization allows the units to operate in the extreme environment typical for ion beam implantation. Spellman’s ST Series from 1kV-225kV @ 12kW, with parallel operation allowing powers of 100kW’s or more power the implanters of both today and tomorrow.
- Output Voltage from 1kV to 130kV
- Output Power from 10W to 1.2kW
- Very Compact and Lightweight
- Extensive Analog and Digital Interface
- Reversible Polarity Standard up to 8kV
- Arc Quench/Arc Count/Arc Trip
- Models from 1kV to 225kV
- 12kW in Single 6U (10.5”) Chassis
- Parallel Units for >100kWChassis
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 70kV
- Output Power 4 kW
- Single 3U (5.25”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 150kV
- Output Power 6kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- Arc and Short Circuit Protected
- User Configurable Settings Via Ethernet Interface
