Microscópio electrónico escaneando

El EBM20 alimenta las columnas E-Beam en microscopios electrónicos de barrido termiónico que proporcionan fuentes de aceleración, polarización y filamentos en un único paquete compacto. La tecnología de encapsulación y empaquetado HV patentada de Spellman ofrece mejoras dramáticas en tamaño, costo y rendimiento en comparación con otras ofertas de suministro de energía SEM. El EBM20 proporciona un suministro de acelerador ultra estable, de bajo ruido y altamente regulable, programable de 0 a -20kV a 200uA. El EBM20 tiene polarización flotante y suministros de filamentos referenciados al acelerador. Las señales de programación utilizan entradas analógicas diferenciales para minimizar el ruido externo y los efectos de voltajes compensados. Se proporciona un monitor de corriente del acelerador referenciado a tierra. El EBM20 es inmune al arco y cortocircuito, junto con protección contra sobretensión y sobrecorriente.

Aplicaciones Típicas:

• Microscópio electrónico escaneando

Especificaciones

^{(Ref. 128031-001 REV. D)}

SPECIFICATIONS:

Input Voltage:

+24Vdc, ±5%, 1.5A maximum

High Voltage Outputs:

ACCELERATOR:

Voltage:

0V to -20kV full load with respect to ground

Current:

250μA maximum (including feedback current), continuous
from -500V to -20kV.

Current Trip Level:

275mA, ±10%. Trips off all outputs, reset by cycling
i nput power

Accuracy (voltage program):

±1% from -500V to -20kV

Load Regulation:

<±100ppm, 20μA to 250μA load change

Line Regulation:

<±100ppm for 10% line change

Ripple:

<20ppm p-p at -20kV, 250μA, maximum bias and filament output

Temperature Coefficient:

<100ppm/°C

Stability:

30ppm/3 minutes at 100μA load current after 1 hour warm up

Rise Time (switch ON):

<3 seconds (0% to 90%) with no overshoot

Fall Time (switch OFF):

<100 seconds (to <50 volts)

BIAS:

(Referenced to Accelerator)

Voltage:

0 to +1.5kV (max allowable output limited to 2kV)

Current:

150µA maximum

Accuracy (voltage program):

±3% of full scale

Line Regulation:

<±0.1% for 10% line change

Ripple:

<0.1% p-p

Temperature Coefficient:

<1000ppm/°C

Stability:

1%/10 minutes

Rise Time (switch ON):

<3 seconds (0% to 90%) with no overshoot

Fall Time (switch OFF):

<100 seconds (to <50 volts)

FILAMENT:

(center voltage WRT accelerator output)

Power:

0 to 12W

Load Resistance:

1.33Ω ±5%

Accuracy:

±3% of FS

Load Regulation:

<1% for 10% change in load resistance

Line Regulation:

<1% for 10% line voltage change

Ripple:

<0.1% p-p max

Temperature Coefficient:

<300ppm/°C

Stability:

100ppm/10 minutes

INTERFACE:

Input:

Analog control for accelerator, filament and bias

High Voltage Output:

Custom 3 pin receptacle and cable assembly

Temperature:

Operating: 5°C to +40°C

Storage: -20°C to +50°C

Humidity:

20% to 85% RH, non-condensing

Dimensions:

10.63˝H x 2.36˝W x 7.87˝D (270mm x 60mm x 200mm) excluding any mounting brackets

Weight:

<10 lbs. (4.5kg)

Regulatory Approvals:

UL recognized component (RC). File number E354595. Compliant to IEC/UL 61010-1 Safety requirements for electrical equipment for measurement, control and laboratory use; CAN/CSA-C22.2 No.61010-1. CE marked to EN 61010-1. UKCA marked to BS EN 61010-1. RoHS compliant. As the unit is designed for incorporation within the users system it is not tested against any specific EMC standards. The user will need to take sensible EMC precautions when designing the unit in and verify the overall system EMC performance against any relevant standards.

POWER INPUT CONNECTOR JHA2 3 PIN JST MODEL B 3PS-VH

CONTROL AND MONITORING CONNECTOR JHA3 10 PIN JST MODEL S10B-EH

Tablas y Diagramas

HV CABLE ASSEMBLY DETAILS

DIMENSIONS: in.[mm]

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